Products and Services
Open

CME Series for Crystal Devices and Other Electronic Parts
The evaporation equipment for electronic parts and R&D.

  • Features
  • Specifications
  • Applications

Features

  • The cylindrical front door design make the operation continent and high quality, highly reliable thin film is available.
  • Single layer, multilayer film both are available.
  • Chamber size maxΦ700㎜.
  • capable of wafer size.
  • Save the space by low cost and high productivity.

Spec example　CME‐70

Equipment constitution
Batch type, substrate rotation type
Substrate dome
Φ600　Φ４wafer
Source
electron gun type, crucible 4 points or 6 points
Operation
Fully automated（vent・deposition）

Applications

  • Electronic parts
  • Crystal device
  • SAW/FBAW
  • Thin film sensor
  • Others

Contact Us

We can customize the vacuum equipment according to your request, so please contact us.

Inquiries about our products