CM Series for Optical Parts
The evaporation equipment for the optical parts.

  • Features
  • Specifications
  • Applications


  • The cylindrical front door design makes the operation continent and high quality, highly reliable thin film is available.
  • Multilayer film is available.
  • The series chamber size is ranging from Φ400 to 1800㎜.

Typical specifications

Equipment constitution
Batch type, substrate rotation type
Substrate dome
MAXΦ1600 heat up substrate
resistance heating type 2 units
electron gun type (option)
Fully Automated(vent・heat up・evaporate)


  • Anti-reflective coating (AR coating)
  • Reflective surface films
  • Dielectric filters
  • Others

Contact Us

We can customize the vacuum equipment according to your request, so please contact us.