Maintenance Service・Sales of Maintenance Parts

In order to ensure stable use of your Canon Tokki ‘s equipment for a long time, we can provide preventive maintenance services such as equipment inspections, replacement of parts/units, reconditioning of pumps and associated units, etc.
This prevents equipment failure, maintains equipment performance, and contributes to stable operation.

• Equipment inspection
• Equipment overhaul(bearings for drive units, cylinder replacement, etc.)
• Overhaul of exhaust system (pumps, valves, etc.）
• Overhaul for vacuum chamber interior（removal of film deposition, cleaning）
• Parts cleaning
• Equipment relocation
• Sales of genuine maintenance parts