Maintenance Service・Sales of Maintenance Parts

In order to ensure stable use of your Canon Tokki ‘s equipment for a long time, we can provide preventive maintenance services such as equipment inspections, replacement of parts/units, reconditioning of pumps and associated units, etc.
This prevents equipment failure, maintains equipment performance, and contributes to stable operation.

  • Equipment inspection
  • Equipment overhaul(bearings for drive units, cylinder replacement, etc.)
  • Overhaul of exhaust system (pumps, valves, etc.)
  • Overhaul for vacuum chamber interior(removal of film deposition, cleaning)
  • Parts cleaning
  • Equipment relocation
  • Sales of genuine maintenance parts

Contact Us

For queries related to after-sales services, use the phone or fax number described below or go to the Contact Us page.
Please note that it may take some time for us to respond, depending on the type of inquiries.

CS Promotion Department, Canon Tokki Corporation
10-1 Shinko-cho, Mitsuke-shi, Niigata 954-0076 Japan