About Canon Tokki
Products and Services
OLED
Sustainability
NEWS
Contact Us
About Canon Tokki
Products and Services
OLED
Sustainability
NEWS
Contact Us
About Canon Tokki
TOP Message
Our Corporate Philosophy
Corporate Profile
Historical Highlights
Canon Tokki Operations
Official Social Media Accounts
Download Corporate Profile
Products and Services
Products
Services
OLED
What is OLED?
Manufacturing Process of OLED
Canon Tokki's Distinctive Technology
Future of OLED
Sustainability
Corporate Governance
Product Safety Initiatives
Environmental & Quality Policy
Procurement of Materials
Information Security Policy
Community-Related Initiatives
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About Canon Tokki
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About Canon Tokki
TOP Message
Our Corporate Philosophy
Corporate Profile
Historical Highlights
Canon Tokki Operations
Official Social Media Accounts
Download Corporate Profile
Products and Services
Back
Products and Services
Products
Back
Products
OLED Mass Production System – System-ELVESS
Small to Medium Volume Production System – Small-ELVESS
Research & Development System – Try-ELVESS
CM Series for Optical Parts
CME Series for Crystal Devices and Other Electronic Parts
Compact Carousel Sputtering Equipment SPS Series
Vertical Return Style Sputtering Equipment SPL-V Series
Horizontal Inline-Type Sputtering Equipment SPL-H Series
Sputtering Equipment SPK Series
High-Vacuum Annealing Furnace
Services
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Services
Maintenance Service・Sales of Maintenance Parts
Modification/Customization Support
OLED
Back
OLED
What is OLED?
Manufacturing Process of OLED
Canon Tokki's Distinctive Technology
Future of OLED
Sustainability
Back
Sustainability
Corporate Governance
Product Safety Initiatives
Environmental & Quality Policy
Procurement of Materials
Information Security Policy
Community-Related Initiatives
NEWS
Contact Us
Products and Services
Open
Products and Services
Products
OLED Mass Production System – System-ELVESS
Small to Medium Volume Production System – Small-ELVESS
Research & Development System – Try-ELVESS
CM Series for Optical Parts
CME Series for Crystal Devices and Other Electronic Parts
Compact Carousel Sputtering Equipment SPS Series
Vertical Return Style Sputtering Equipment SPL-V Series
Horizontal Inline-Type Sputtering Equipment SPL-H Series
Sputtering Equipment SPK Series
High-Vacuum Annealing Furnace
High-Vacuum Annealing Furnace
The anneal equipment can perform the high-precision heat treatment under high vacuum.
Features
Specifications
Applications
Features
Clean exhaust system.
Temperature stability and uniformity is excellent.
In addition to batch type, the automatic line combined with equipment and transfer system is also available.
Spec example ANM‐402
Exhaust performance
Ultimate pressure /less than 5E‐5Pa
Heat
MAX400℃
Usually within 350℃ ±5%(Heater side up)
Applications
Electronic parts
Crystal device
Others
Contact Us
We can customize the vacuum equipment according to your request, so please contact us.
Inquiries about our products
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High-Vacuum Annealing Furnace