Vacuum Process: Thermal Processing Equipment
High-Vacuum Annealing Furnace
Integrated deposition processing of thin-film solar cells.

  • Overview
  • Applications

Basics

Supports high-precision thermal processing under high vacuum.

Features

Clean exhaust system.
Stable and excellent temperature distribution.
Wide range of lines, including batch types and automatic lines that are combined with delivery.

Applications

Crystal devices
Various types of electronic devices
Others