Vacuum Process: Thermal Processing EquipmentHigh-Vacuum Annealing FurnaceIntegrated deposition processing of thin-film solar cells.

- Overview
- Applications
Basics
Supports high-precision thermal processing under high vacuum.
Features
Clean exhaust system.
Stable and excellent temperature distribution.
Wide range of lines, including batch types and automatic lines that are combined with delivery.
Applications
- Crystal devices
- Various types of electronic devices
- Others