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Research & Development System – Try-ELVESS
Manufacturing equipment for evaluating material development and process development

  • Features
  • Specifications
  • Applications

Features

  • The optimized equipment for OLED R&D and material development.
  • The compact equipment integrates the O2 plasma cleaning chamber, organic emitting layer evaporation chamber, metal electrode evaporation chamber, encapsulation chamber. This enables to produce high quality OLED display sample device from deposition to encapsulation without touching the atmosphere.
  • This provides fundamental development efficiently for OLED device.

Typical specifications

Glass substrate
100 x 100 mm, with an effective deposition area of 82 x 90 mm
Plasma cleaning chamber
RF plasma power supply, O2 mass flow controller
Deposition chamber #1
Low-temperature cell evaporation source (8 pieces), pin mask positioning mechanism ±0.1 mm
Deposition chamber #2
Low-resistance heating evaporation source (4 pieces), pin mask positioning mechanism ±0.1 mm
Delivery chamber
Substrate delivery mechanism, N2 substitution mechanism
Encapsulation chamber
Manual laminating mechanism, UV lamp unit, N2 dehydration and circulation mechanism
Passage chamber
Exhaust: Fully automatic
Deposition: Semi-automatic operation
Encapsulation: Semi-automatic operation
Control system
Exhaust: Fully automatic
Deposition: Semi-automatic operation
Encapsulation: Manual operation
Film thickness control through crystal monitor sensor deposition control
Options
Electron beam gun evaporation source, high-temperature cell, oxygen meter, dry pump

Applications

  • Organic OLED display panel
  • Organic photovoltaic cell
  • Organic semiconductor

Contact Us

We can customize the vacuum equipment according to your request, so please contact us.

Inquiries about our products