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Mass production system that supports Gen6 half substrate size
Equipment for Small & Medium Volume Production
Manufacturing equipment for evaluating material development and process development
The evaporation equipment for electronic parts and R&D
Space saving ・ high efficiency sputtering equipment by adopting carousel method
The vertical sputter type sputtering mass production equipment can handle with small-medium substrate
The horizontal inline type mass production sputtering equipment can handle with large substrate
High performance sputtering equipment is applied from R&D to small scale production
The anneal equipment can perform the high-precision heat treatment under high vacuum
