OLED: Small to Medium Volume Production SystemSmall to Medium Volume Production System – Small-ELVESSEquipment for Small & Medium Volume Production

- Overview
- Specifications
Basics
Equipment name: Small-ELVESS
Features
This equipment is ideal for basic R&D and small-volume production of OLED displays. All processes, from O2 plasma cleaning to deposition and encapsulation, are performed in a single system. It is possible to create high-performance OLED devices because there is no contact with the atmosphere. Highly reproducible processing makes efficient device process development possible, all the way up to the transition to mass production.
Typical specifications
- Glass substrate
- 200 x 200mm, with an effective deposition area of 160 x 160mm
- Load lock chamber
- One substrate and two masks in a three-stage elevation mechanism
- Plasma cleaning chamber
- RF plasma power supply, O2 mass flow controller
- Deposition chamber #1
- Low-temperature cell evaporation source (8 pieces), alignment mechanism ± 5μm
- Deposition chamber #2
- Low-resistance heating evaporation source (4 pieces), alignment mechanism ± 5μm
- Delivery chamber
- Glass substrate delivery mechanism, N2 substitution
- Encapsulation chamber
- Semi-automatic laminating mechanism, UV lamp unit, N2 dehydration and circulation mechanism, N2 substitution mechanism
- Passage chamber
- Exhaust: Fully automatic
Deposition: Semi-automatic operation
Encapsulation: Semi-automatic operation
- Control system
- Substrate delivery: Semi-automatic operation with film thickness control through crystal deposition control
- Options
- Addition of deposition chamber or sputter chamber
Electron beam gun evaporation source, high-temperature cell, oxygen meter, dry pump