Compact Carousel Sputtering Equipment SPS Series
Space saving ・ high efficiency sputtering equipment by adopting carousel method.

  • Features
  • Specifications
  • Applications


  • Excellent film thickness uniformity by adopting the carousel high speed rotation.
  • Easy to unload substrate・exchange target.
  • Enable to evaporate the 2 types material mix layer.
  • Both sides of substrate can be evaporated within the batch by automated reversal mechanism.
  • Save the space by low cost and high productivity.

Spec example SPS‐402

Equipment constitution
Process chamber batch type
Substrate size
MAX16 pieces/ batch
DC square planar type 2 units DC4Kw
Fully automated(vent・heat up・evaporate)


  • Electronic parts
  • Crystal device
  • Chip resistors
  • LED
  • Others

Contact Us

We can customize the vacuum equipment according to your request, so please contact us.