Compact Carousel Sputtering Equipment SPS Series

Space saving ・ high efficiency sputtering equipment by adopting carousel method.

Features

• Excellent film thickness uniformity by adopting the carousel high speed rotation.
• Easy to unload substrate・exchange target.
• Enable to evaporate the 2 types material mix layer.
• Both sides of substrate can be evaporated within the batch by automated reversal mechanism.
• Save the space by low cost and high productivity.

Spec example SPS‐402

Applications

• Electronic parts
• Crystal device
• Chip resistors
• LED
• Others