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OLED Mass Production System – System-ELVESS
Mass production system that supports Gen6 half substrate size

  • Features
  • Specifications
  • Applications

Features

  • For mass production
  • Organic material and cathode metal material evaporation technology, fully-automated transfer technology by using high-accuracy robot technology, high-precision alignment technology which is critical for the high- definition pixels, this fully automated mass production system is merged by all the technologies our company accumulated since our foundation and keeps top market share in the world.
  • Option：For inline type，For wafer substrate

Typical specifications

Glass substrate
Gen6 half substrate size
TFT patterned glass substrates
Exhaust
10-5 Pa level
Deposition
Organic material: Heater-controlled evaporation point source, thickness uniformity: ±5%
Metal material: Heater-controlled evaporation point source, thickness uniformity: ±7%
Control
Automated operation by controlling transport, exhaust, deposition, and encapsulation conditions based on computer and sequencer settings.
Mask alignment
Positioning of glass substrates and metal masks aligned to within ±3 μm.

Applications

  • OLED display panel（smart phone, OLED TV, Automotive, VR）
  • Organic photovoltaic cell
Canon Tokki's Distinctive Technology
OLED display Production System Introduction Movie
（YouTube）

Contact Us

We can customize the vacuum equipment according to your request, so please contact us.

Inquiries about our products