OLED: Mass Production System
OLED Mass Production System – System-ELVESS
Mass production system that supports Gen6 half substrate size

  • Overview
  • Specifications

Basics

Equipment name: System-ELVESS

Features

This system was developed for mass production. This fully automated mass production system fuses all of the technologies our company has accumulated since the foundation in a single system and holds the world's top market share. These technologies include organic material and cathode metal material deposition expertise, fully automated encapsulation system based on precision robotics technologies, and high-precision alignment mechanisms and control technology indispensable for full-color pixel fabrication.

Canon Tokki's Distinctive Technology

Typical specifications

Glass substrate
Gen6 half substrate size
TFT patterned glass substrates
Exhaust
10-5 Pa level
Deposition
Organic material: Heater-controlled evaporation point source, thickness uniformity: ±5%
Metal material: Heater-controlled evaporation point source, thickness uniformity: ±7%
Control
Automated operation by controlling transport, exhaust, deposition, and encapsulation conditions based on computer and sequencer settings.
Mask alignment
Positioning of glass substrates and metal masks aligned to within ±3 μm.