OLED: Mass Production SystemOLED Mass Production System – System-ELVESSMass production system that supports Gen6 half substrate size

- Overview
- Specifications
Basics
Equipment name: System-ELVESS
Features
This system was developed for mass production. This fully automated mass production system fuses all of the technologies our company has accumulated since the foundation in a single system and holds the world's top market share. These technologies include organic material and cathode metal material deposition expertise, fully automated encapsulation system based on precision robotics technologies, and high-precision alignment mechanisms and control technology indispensable for full-color pixel fabrication.
Typical specifications
- Glass substrate
- Gen6 half substrate size
TFT patterned glass substrates
- Exhaust
- 10-5 Pa level
- Deposition
- Organic material: Heater-controlled evaporation point source, thickness uniformity: ±5%
Metal material: Heater-controlled evaporation point source, thickness uniformity: ±7%
- Control
- Automated operation by controlling transport, exhaust, deposition, and encapsulation conditions based on computer and sequencer settings.
- Mask alignment
- Positioning of glass substrates and metal masks aligned to within ±3 μm.