Vacuum Process: Sputtering EquipmentCompact Carousel Sputtering Equipment SPS-402Space-saving and enables efficient production
Basics
Equipment name: SPS-402
Features
Excellent film thickness uniformity due to the high-speed carousel rotation
Easy carrier insertion/removal and target replacement
Supports two different types of laminated film deposition
An automatic reversal mechanism makes deposition possible on both surfaces of the substrates in the batch
Applications
- Crystal devices
- Chip resistors
- Electronic parts
- Others
Vacuum Process: Sputtering EquipmentVertical Return Style Sputtering Equipment SPL-V SeriesSupports compact substrates and medium glass substrates
Basics
Equipment name: SPL-V Series
Features
Highly flexible system design
Supports full automation
Long continuous operation
Supports substrates of various shapes
Applications
- Magnetic recording media
- Electronic parts
- Crystal base coating
- Next-generation photovoltaic cell manufacturing equipment
- Others
Vacuum Process: Sputtering EquipmentHorizontal Inline-Type Sputtering Equipment SPL-H SeriesHigh-precision film thickness uniformity with a high rate
Basics
Equipment name: Vacuum Evaporation Equipment CM/CME Series
Features
Horizontal inline-type sputtering equipment
Equipment design ideal for deposition up and deposition down methods
Supports full automation
Long continuous operation
High-precision film thickness uniformity with a high rate, using a proprietary cathode system
SAW/FBAR
Applications
- Thin-film photovoltaic cells
- Architectural glass
- Others