Vacuum Process: Vacuum Evaporation Equipment
CM Series for Optical Parts
System for optical parts

Basics

Equipment name: CM Series

Features

This optical multilayer film vacuum evaporation system is for optical parts. The cylindrical shape and front access door of this system make it extremely user-friendly, and it produces high-quality, highly reliable thin films. The CM series is available in a range of chamber sizes from φ400 to 1800 mm, depending on the application.

Applications

Anti-reflective coating (AR coating)
Reflective surface films
Dielectric filters

Vacuum Process: Vacuum Evaporation Equipment
CME Series for Crystal Devices and Other Electronic Parts
System for electronic parts

Basics

Equipment name: CME Series

Features

This vacuum evaporation system is used in fields such as crystal devices, thin-film sensors, electronic parts, and new material development. A wide range of options is available for any application, such as substrate rotation and reversal fixtures, low-resistance heating evaporation sources, electron beam gun deposition sources, and others.

Applications

Crystal devices
Electronic parts
Thin-film sensors
Others