Vacuum Process: CVD Equipment
CVD Equipment ELVESS-PE-CVD
For various applications from OLED and semiconductors to solar cells

  • Overview
  • Applications

Basics

Equipment name: ELVESS-PE-CVD

Features

Supports metal mask-through deposition
Supports low-temperature deposition at 80 degrees Celsius or lower
Supports up to Gen-4 glass substrate sizes
Supports both face-down and face-up deposition methods

Applications

OLED displays
Organic semiconductors
Photovoltaic cells
Others