This equipment processes large glass substrates with continuous in-line processing, including deposition processing of electrodes and light-absorbing layers. Our proprietary carrier delivery method is used to enable stable mass production operation. We have a wide variety of product lines, including cluster-type mass production equipment and R&D equipment.
This photovoltaic cell manufacturing equipment applies our expertise in the substrate delivery technology based on vacuum robots and vacuum deposition technology, which we have gained through the development and manufacturing of OLED display manufacturing equipment. Canon Tokki supports a variety of needs, from cell development to pilot production.